Cd-Sem Measurement System (Ipms-Mrs03.1) - Pr884397-2480-P Tender, Germany - 116400372

Procurement Summary

Country : Germany

Summary : Cd-Sem Measurement System (Ipms-Mrs03.1) - Pr884397-2480-P

Deadline : 17 Apr 2025

Other Information

Notice Type : Tender

TOT Ref.No.: 116400372

Document Ref. No. : 176775-2025

Competition : ICB

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

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Tender Details

1 CD-SEM Measurement System Requirements for top-down measurement of critical dimensions of lines/spaces, holes/columns and other fine features, such as elongated hile/pillar patterns formed on semiconductor wafers during wafer fabrication, using a high-throughput CD-SEM. The system is used for processing MEMS wafers in a CMOS-compatible clean-roam class 10 (approx. ISO 4) production environment. Optional service items: 1.15General requirementsThe system is equipped with an uninterruptible power supply (UPS).Yes 3.3Measurement systemThe traceable certified standard is part of the delivery. The calibrations are not older than 20% of the recommended calibration interval at the time of delivery. Note: A traceable certified standard can be provided by the supplier. Otherwise, Fraunhofer IPMS will provide a VLSI-certified standard.Yes 4.16ProcessThe system is capable of performing 3D measurements using a tilted beam.Yes 4.17ProcessThe system can detect and visualize backscattered electrons (BSE). It is possible to perform CD measurements on the BSE image.Yes 8.2Optional tool featuresPlease provide an offer for a set of consumables (lamps, O-rings, valves, etc.).Yes 8.4Optional tool featuresPlease provide a separate offer for typical spare parts such as axis encoder, laser interferometer, etc.Yes 11.4Extended WarrantyShould offered extended warranty starting from the date on which the statutory warranty expires. An extended warranty of further 12 months should be offered. During t...
Document Type: Contract Notice
Reference Number: PR884397-2480-P
Contract Type: supplies
Authority Type: pub-undert
Doc Title: CD-SEM Measurement System (IPMS-MRS03.1) - PR884397-2480-P
Dispatch Date: 2025-03-17
Publish Date: 2025-03-19
Submission Date: 2025-04-17

Documents

 Tender Notice