Procurement Summary
Country : Germany
Summary : Delivery Mask Aligner for Optical Photolithography and Nanoimprint Lithography
Deadline : 11 Jun 2022
Other Information
Notice Type : Tender
TOT Ref.No.: 54039668
Document Ref. No. : 292760-2021
Competition : ICB
Financier : Self Financed
Purchaser Ownership : -
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
Document Type: Corrigendum / Additional Information (please refer to the Tender Document)
Title: Delivery Mask Aligner for Optical Photolithography and Nanoimprint Lithography
Reference Number: F41_000405
Contract Type: Supplies
Description: Mask ALIGNER for optical photolithography and nanoimprint lithography
The procurement of a mask aligner is intended to enable lithography for structural variables of approx. 1.0 microns, for selected structures, including. Especially for nanostructuring, the mask aligner should also provide an option for nanoimprint lithography. To avoid the use of mercury vapor lamps, an LED light source is to be used here.
Further information and requirements can be found on the specifications under the point "Assignment documents".
38000000 - Laboratory, Optical and Precision Equipments (excl. Glasses)
Authority Type: Body Governed by Public Law
Type of Procedure: Open Procedure
Regulation: European Union, with Participation by GPA Countries
Bid Type: Submission for All Lots
Doc Title: Laboratory, Optical and Precision Equipments (excl. Glasses) br ...
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Tender Notice