Procurement Summary
Country : Germany
Summary : Electron Beam Lithography System
Deadline : 06 May 2022
Other Information
Notice Type : Tender
TOT Ref.No.: 65239669
Document Ref. No. : 183577-2022
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
Name :Login to see tender_details
Address : Login to see tender_details
Email : Login to see tender_details
Login to see detailsTender Details
Document Type: Contract Notice
Title: Electron beam lithography system
Reference Number: 27-22 LR
Contract Type: Supplies
Description: The University of Duisburg-Essen explored in the center for semiconductor technology and optoelectronics
in Duisburg materials, semiconductor technologies and module integration for applications in the
Maximum frequency electronics and in optoelectronics. In Zho becomes the implementation of the
Research work a consistent process line in a clean room until class 5 (ISO
14644-1) operated.
For the investigation of nanoscale components is a high-resolution
Electron beam lithography system needs. It should be procured a plant that the
The current state of the art in terms of maximum resolution and positioning accuracy
represents. The plant should have a high level of development, e.g. through the use in
Industry and / or research institutes can be assigned. A high Automation is required to effectively enable multi-user operation.
Further information can be found in the assignment documents.
38341100 - Electron-Beam Recorders
Auth ...
Documents
Tender Notice