Procurement Summary
Country : USA
Summary : Gas Analyzer
Deadline : 12 Feb 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 113956923
Document Ref. No. : NIST-FY25-CHIPS-0054
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
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Description
Notice ID Number: NIST-FY25-CHIPS-0054
Title: Sources Sought Notice for Cavity Ringdown Gas Analyzer for Trace Moisture
The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government-s anticipated needs.
BACKGROUND
The National Institute of Standards and Technology (NIST) is developing in situ process diagnostics for vapor phase deposition processes used in semiconductor manufacturing. Run within the Material Measurement Laboratory (MML), this program aims to design and evaluate new metrology capabilities to address needs in advanced process control and modeling for high volume manufacturing. The Chemical Process and Nuclear Measurements Group in the Chemical Sciences Division has specialized ultra-high purity gas handling systems, test stands for precursor delivery characterization, and deposition reactors for thin film growth characterization. These flow systems are equipped with various in situ and inline measurements used to characterize precursor concentration, flow rate, gas phase reactions, and surface reactions. The group has undertaken a project in the CHIPS R&D Metrology program focused on Digital Twins for Atomic Layer Deposition (ALD) Processes. In support of this work, the group requires a gas analyzer based on cavity ringdown spectroscopy (CRDS) and configured for trace moisture analysis (NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above.
HOW TO RESPOND TO THIS NOTICE
In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possibl...
Active Contract Opportunity
Notice ID : NIST-FY25-CHIPS-0054
Related Notice
Department/Ind. Agency : COMMERCE, DEPARTMENT OF
Sub-tier : NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Office: DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Sources Sought (Original)
Original Published Date: Jan 29, 2025 09:24 am EST
Original Response Date: Feb 12, 2025 12:00 pm EST
Inactive Policy: 15 days after response date
Original Inactive Date: Feb 27, 2025
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Place of Performance: Gaithersburg, MD 20899 USA
Documents
Tender Notice