Procurement Summary
Country : USA
Summary : High-pressure xPS System
Deadline : 03 Dec 2024
Other Information
Notice Type : Tender
TOT Ref.No.: 110388038
Document Ref. No. : NIST-SS25-CHIPS-0027
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Description
NIST-SS25-CHIPS-0027
Title: High-pressure xPS System
The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government-s anticipated needs.
BACKGROUND
Advanced in situ and operando methods for real-time monitoring of the chemical status of wafer surfaces, thin films, and interfaces are essential for semiconductor process development and control. NIST is seeking information from sources that may be capable of providing a commercial item solution that meets or exceeds the criteria below.
The required setup consists of a differentially pumped μ-metal shielded Ambient-Pressure (AP) xPS spectrometer (also denoted as Near-Ambient-Pressure (NAP)) equipped with 2D electron detector and x-ray source capable of providing an intense, focused x-ray beam to the sample under elevated pressures. Both the APxPS analyzer and x-ray source are connected to the custom-made reaction chamber made of non-magnetic materials, where the elevated-pressure reactive environment is maintained. The pressure in the reaction chamber varies from UHV to a few Torr, and its gaseous composition includes (but is not limited to) N2, He, H2, Ar, O2, CH4, CF4, and H2O and their mixtures. The reaction chamber has its own pumping system and controls.
AP(NAP) xPS analyzer operates under the above-specified pressure conditions, providing at least a few kcps Ag 3d5/2 count rate at a few Torr pressures from the Ag test sample exited by a designated Al Kα x-ray source. As large as possible: the working distance of the analyzer, electron kinetic energy range (typically 20 eV to 1500 eV and beyond), as well as the highest spectral and spatial resolution, are required.
The designated x-ray source is equipped with a highly x-ray transparent membrane window that can withstand the pressure differential with the reaction chamber. The source provides highly focused monochromatized A...
Active Contract Opportunity
Notice ID : NIST-SS25-CHIPS-0027
Related Notice
Department/Ind. Agency : COMMERCE, DEPARTMENT OF
Sub-tier : NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
Office: DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Sources Sought (Original)
Original Published Date: Nov 19, 2024 12:02 pm EST
Original Response Date: Dec 03, 2024 05:00 pm EST
Inactive Policy: 15 days after response date
Original Inactive Date: Dec 18, 2024
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing
Place of Performance: Gaithersburg, MD 20899 USA
Documents
Tender Notice