Procurement Summary
Country : Belgium
Summary : Jpa2025id 57 - 1
Deadline : 31 Mar 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 115639080
Document Ref. No. : 139510-2025
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
A 300mm wafer compatible, multi-chamber PVD platform designed for high throughput of magnetic tunnel junctions. Additionally, the following PVD and process chamber designs that must be supported are: 1) Multi-cathode PVD chamber 2) a pre-clean chamber to remove native oxides and other contaminants, 3) degass/annealing capability and, 4) a cryogenic stage (100k) option in, or ex, situ of the pvd modules. furthermore, the platform must be compatible with front opening universal pods with a 25-slot capacity, including an equipment front end module and load-lock system for wafer loading. finally, the deposition must be computer controlled and automated following defined recipes. as an optional, the platform should be compatible with automatic recipe upload from fab management software via a standardized protocol, for example secs/gem.
Doc Title: JPA2025ID 57 - 1
Contract Type: supplies
Document Type: Contract Notice
Reference Number: JPA2025ID 57
Contract Type: supplies
Authority Type: cga
Doc Title: JPA2025ID 57 - 1
Dispatch Date: 2025-02-28
Publish Date: 2025-03-03
Submission Date: 2025-03-31
Documents
Tender Notice