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LEIBNIZ INSTITUTE FOR PHOTONIC TECHNOLOGIES E.V. has floated a tender for Maskless Aligner. The project location is Germany and the tender is closing on 16 Apr 2024. The tender notice number is 153604-2024, while the TOT Ref Number is 98712719. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country : Germany
Summary : Maskless Aligner
Deadline : 16 Apr 2024
Other Information
Notice Type : Tender
TOT Ref.No.: 98712719
Document Ref. No. : 153604-2024
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : EUR 457300.00
Purchaser's Detail
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Login to see detailsTender Details
The Leibniz Institute for Photonic Technologies e.V. is tendering for a maskless aligner for photolithography, which is to be used for the maskless exposure of photoresist layers on different substrates from single chips to 150 mm wafers. The central requirements aThe system features structure resolutions of up to 600 nm line width (CD) in the resist, precise multi-level alignment with up to 250 nm coverage accuracy and writing speeds that enable exposure numbers of at least 1000 wafers per year.
Doc Title: Maskless Aligner
Contract Type: supplies
Document Type: Contract Notice
Reference Number: 04.24.O.00
Contract Type: supplies
Estimated Value: 457300.00 - EUR
Authority Type: org-sub
Doc Title: Maskless Aligner
Dispatch Date: 2024-03-12
Publish Date: 2024-03-13
Submission Date: 2024-04-16
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