Procurement Summary
Country : USA
Summary : Photomask Substrates
Deadline : 11 Jul 2024
Other Information
Notice Type : Tender
TOT Ref.No.: 103290063
Document Ref. No. : NB680000-24-02146
Competition : ICB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Description
BACKGROUND
NIST has a need for three lock-in amplifiers that meets or exceeds the following draft minimum specifications:
The National Institute of Standards and Technology (NIST) -Boulder has a state-of-the-art research laboratory to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). The BMF patterns and utilizes master photomask substrates to fabricate microelectronics circuits. These photomask substrates are patterned in-house using our optical pattern generator using photomask substrates, and then are used in the optical wafer stepper to transfer the pattern onto the wafer being processed. Our current stepper requires 6” photomask substrates made to exacting semiconductor standards (SEMI Spec SEMI P1-0708). These photomask substrates consist of a 6” square transparent substrate (soda-lime glass) coated with a Chromium (Cr) based opaque material and photoresist.
The goal of this contract is to provide the BMF with an initial order of 80 to 320 photomask substrates, depending on the Government-s needs. Provide the BMF with a mechanism to procure photomask substrates as the need arises. Provide all new items. Refurbished plates are not acceptable.
Description: Photomask substrates
Quantity: minimum of 400 photomask substrates and a maximum of 1520 photomask substrates.
Specifications:
The contractor shall supply the Government with photomask substrates that conform to SEMI Spec SEMI P1-0708: “SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES”. Material: Soda lime glass Size: Min 151.6 mm Max 152.4 mm (nominal 6”) Thickness: 3.05 +/- 0.1 mm (nominal 0.12”) Squareness: The following must be met in a circle of quality of 100 mm diameter Flatness: 15 mm or better Cr nominal thickness: 95 nm -115 nm Cr thickness variation: Optical density: 3 @ 365 nm Pinholes: 0 5mm Photoresist: AZ1350 ...
Active Contract Opportunity Notice ID NB680000-24-02146 Related Notice Department/Ind. Agency COMMERCE, DEPARTMENT OF Sub-tier NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY Office DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Sources Sought (Original)
All Dates/Times are: (UTC-04:00) EASTERN STANDARD TIME, NEW YORK, USA
Original Published Date: Jun 26, 2024 11:39 am EDT
Original Response Date: Jul 11, 2024 11:00 am EDT
Inactive Policy: 15 days after response date
Original Inactive Date: Jul 26, 2024
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 333310 - Commercial and Service Industry Machinery Manufacturing
Place of Performance: Boulder, CO 80305 USA
Documents
Tender Notice