Plasma Cleaner Tender, USA - 104313678

Procurement Summary

Country : USA

Summary : Plasma Cleaner

Deadline : 18 Jul 2024

Other Information

Notice Type : Tender

TOT Ref.No.: 104313678

Document Ref. No. : 1333ND4QNB030386

Competition : ICB

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

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Tender Details

Description

AMENDMENT I:

The purpose of this amendment is to address vendor questions that were received prior to the closing of the RFQ.

Questions/Answers:

1. Can a remote plasma cleaner head be a vacuum plasma chamber with electrodes to generate plasma?

The “Remote Plasma Cleaner Head” shall generate a plasma for in-situ cleaning of one particular in-vacuum mirror contained within its own high-vacuum chamber. This mirror transmits extreme ultraviolet light (EUV) through high-vacuum chambers and absorbs infrared (IR) light, and IR light yields carbonization onto the mirror over time. By having the remote plasma head mounted to the mirror-s vacuum chamber, the transmitted EUV flux can be increased by cleaning without bringing the system to atmospheric pressure and without disturbing the alignment of this critical mirror, both of which are in the best interests of research efficiency. To answer the question directly, any remote plasma cleaner head for in-situ cleaning described as described above must be compatible with the high vacuum chamber it attaches to (i.e., when not actively cleaning the mirror with plasma), implying that the Head may be described as a “vacuum plasma chamber.” Although a customized vacuum plasma chamber containing electrodes to generate plasma might satisfy the technical specifications, the Minimum Requirements state that “Experimental, prototype, or custom items will not be considered.“



2. What is the minimum dimension requirement of the chamber?

No minimum dimensional requirement exists on the size of the Remote Plasma Cleaner Head other than having a KF-40 or equivalent port.

3. What are the maximum dimensions of the samples for plasma treatments?

There is but one sample intended for plasma treatments, a particular in-vacuum mirror within the EUV HHG high-vacuum beamline. The KF-40 port specification implies coverage over approximately a 1.5-inch diameter circular area in the line-of-sight of the ...
Active Contract Opportunity Notice ID 1333ND4QNB030386 Related Notice Department/Ind. Agency COMMERCE, DEPARTMENT OF Sub-tier NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY Office DEPT OF COMMERCE NIST
General Information
Contract Opportunity Type: Combined Synopsis/Solicitation (Updated)
All Dates/Times are: (UTC-04:00) EASTERN STANDARD TIME, NEW YORK, USA
Updated Published Date: Jul 16, 2024 06:18 am EDT
Original Published Date: Jul 03, 2024 05:37 am EDT
Updated Date Offers Due: Jul 18, 2024 11:00 am EDT
Original Date Offers Due: Jul 12, 2024 11:00 am EDT
Inactive Policy: 15 days after date offers due
Updated Inactive Date: Aug 02, 2024
Original Inactive Date: Jul 27, 2024
Initiative: None

Classification
Original Set Aside: Total Small Business Set-Aside (FAR 19.5)

Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing

Place of Performance: Gaithersburg, MD 20899 USA

Documents

 Tender Notice

REQUIREMENTS-DOCUMENT.docx

1333ND24QNB030386.docx