Procurement Summary
Country : Germany
Summary : Spectroscopic Ellipsometry for Microsystems Technology and Nanotechnology
Deadline : 07 Jul 2023
Other Information
Notice Type : Tender
TOT Ref.No.: 84491785
Document Ref. No. :
Competition : NCB
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
a) Body requesting the tender: Name of the customer: Westsachsische Hochschule Zwickau; Street, house number: Kornmarkt 1; Zip code: 08056; Location: Zwickau; Country Germany; email: procurement@fh-zwickau.de; Telephone number: 49 375-536-0; The authority awarding the contract: see above; stelle to which the bids or requests to participate are to be submitted: see above b) Type of award: public tender c) Form in which the requests to participate or bids are to be submitted: bids can only be submitted electronically; Address to which tenders are to be sent electronically: www.evergabe.de d) Type and scope of the service: Spectroscopic ellipsometry for microsystems technology and nanotechnology Pos. Quantity ME Device designation/description/technical minimum requirement of the performance parameters, product-neutral performance description 1 1 PC Spectroscopic ellipsometer for 150mm wafer - spectral range 190nm to 890nm or further - preparation for extension of spectral range in the NIR - spot size without microspot at most 2mm - optical microscope for sample positioning 1.1 1 STK microspot option - spot size down to 0.05mm possible 1.2 1 STK goniometer - angle bereI 55 - 90 or more - Angle division 5 or finer 1.3 1 PC Sample table - Sample diameter up to 150mm / 6" possible - Range of motion min. 150x150mm 1.4 1 PC PC, keyboard, mouse - PC suitable for software for device control and measurement data evaluation 1.5 1 STK monitor - monitor suitable for a...
Services and products: supplies
tender scope: national tender
award procedure: services and supplies (VOL)
Documents
Tender Notice